There are two variants of Aluminium Nitride. One, a sintered ultra-hard version, the other being what is described as a machinable ceramic, goes under the trade name of Shapal M.

Sintered Aluminium Nitride

Agate Products is mainly involved with the flat grinding and cutting of standard as fired Aluminium Nitride substrates, typically 50mm or 100mm square, into accurate non-standard sizes and thicknesses with a good flatness and an optically polished surface if required. These can be supplied in large production quantities or in low volumes for R & D requirements. We also supply precision machined parts for semiconductor processing chamber fixtures and insulators as well as other similar application.

Main Characteristics

  • Very good thermal conductivity
  • Good dielectric properties
  • Good corrosion resistance
  • Stability in semiconductor processing atmospheres
  • Useful as a non-toxic alternative to Beryllia

Typical Properties

Density g/cm³ 3.26
Knoop Hardness (1000g) Kg/cm² 11
Compressive Strength MPa 2068
Flexural Strength MPa > 350
Modulus of Elasticity GPa 308
Poisson`s Ratio @ 20°C 0.25
Max working temp °C 1370
Coefficient of Thermal Expansion 25 – 1000°C 5 x 10-6/ °C
Thermal Conductivity W/(m·K) 285
Volume resistivity ohm-cm @ Room Temp >10E14
Dielectric constant 1 MHz @ Room Temp 8.0-9.1
Dielectric strength kV/cm 150

Machinable Aluminium Nitride

Machinable Aluminium Nitrides, such as SHAPAL Hi-M, are hybrids of Aluminium Nitride and other materials such as Boron Nitride. This combination results in them being machinable using normal metal cutting tools. Although softer than the sintered form, they nevertheless still maintain some of the characteristics that make Aluminium Nitride popular for a number of applications.

Main Characteristics

  • Easily machined
  • Good thermal conductivity
  • Low thermal expansion
  • Very good electrical insulation
  • Good transparency to Infra-Red light
  • Good corrosion resistance
  • Non wetting by molten metals

Typical Properties (Shapal Hi-M)

Max working temp °C 1000
Coefficient of Thermal Expansion 25 – 1000°C 4.8 x 10-6/ °C
Vickers Hardness Kg/cm² 380
Bending Strength MPa 300
Poisson`s Ratio @ 20°C 0.31
Thermal Conductivity W/(m·K) 92
Density g/cm³ 2.88
Dielectric Strength kV/mm 65